Abstract
Optical emission measurements and intensified charge coupled detector images of a plasma generated by the interaction of a KrF excimer laser with a Ba-ferrite target have been used to study the laser ablation deposition of Ba ferrite thin films. Time integrated spectra were collected as a function of distance above the target surface and as a function of oxygen pressure. Temporal profiles showed that close to the target the plume is insensitive to ambient oxygen pressure and at greater distances a much more pronounced influence is observed. Time resolved images of the overall optical plasma emission clearly demonstrated how the presence of oxygen confines the plasma and enhances its emission
Original language | English |
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Pages (from-to) | 6858-3 pages |
Journal | Journal of Applied Physics |
Volume | 83 |
DOIs | |
Publication status | Published (in print/issue) - 1 Jun 1998 |