Electrical characterization of radio frequency discharges

CMO Mahony, PD Maguire, WG Graham

Research output: Contribution to journalArticle

13 Citations (Scopus)

Abstract

Two electrical techniques that are frequently used to characterize radio frequency plasmas are described: current-voltage probes for plasma power input and compensated Langmuir probes for electron energy probability functions and other parameters. The following examples of the use of these techniques, sometimes in conjunction with other diagnostic methods, are presented: plasma source standardization, plasma system comparison, power efficiency, plasma modelling and complex processing plasma mechanisms.
LanguageEnglish
PagesS60-S67
JournalPlasma Sources Science and Technology
Volume14
Issue number2
DOIs
Publication statusPublished - May 2005

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radio frequency discharge
standardization
power efficiency
electrostatic probes
radio frequencies
electron energy
probes
electric potential

Cite this

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title = "Electrical characterization of radio frequency discharges",
abstract = "Two electrical techniques that are frequently used to characterize radio frequency plasmas are described: current-voltage probes for plasma power input and compensated Langmuir probes for electron energy probability functions and other parameters. The following examples of the use of these techniques, sometimes in conjunction with other diagnostic methods, are presented: plasma source standardization, plasma system comparison, power efficiency, plasma modelling and complex processing plasma mechanisms.",
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Electrical characterization of radio frequency discharges. / Mahony, CMO; Maguire, PD; Graham, WG.

In: Plasma Sources Science and Technology, Vol. 14, No. 2, 05.2005, p. S60-S67.

Research output: Contribution to journalArticle

TY - JOUR

T1 - Electrical characterization of radio frequency discharges

AU - Mahony, CMO

AU - Maguire, PD

AU - Graham, WG

N1 - 17th European Conference on Atomic and Molecular Physics of Ionized Gases, Constanta, ROMANIA, SEP 01-05, 2004

PY - 2005/5

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AB - Two electrical techniques that are frequently used to characterize radio frequency plasmas are described: current-voltage probes for plasma power input and compensated Langmuir probes for electron energy probability functions and other parameters. The following examples of the use of these techniques, sometimes in conjunction with other diagnostic methods, are presented: plasma source standardization, plasma system comparison, power efficiency, plasma modelling and complex processing plasma mechanisms.

U2 - 10.1088/0963-0252/14/2/S08

DO - 10.1088/0963-0252/14/2/S08

M3 - Article

VL - 14

SP - S60-S67

JO - Plasma Sources Science and Technology

T2 - Plasma Sources Science and Technology

JF - Plasma Sources Science and Technology

SN - 0963-0252

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ER -