Electrical and electronic properties of nitrogen doped amorphous carbon (a-CNx) thin films

SC Ray, W Mbiombi, P Papakonstantinou

Research output: Contribution to journalArticle

13 Citations (Scopus)

Abstract

Nitrogen-doped amorphous carbon thin films (a-CNx) were prepared on silicon substrate by pulsed laser deposition process using methane (CH4) and nitrogen (N2) as source gas. The electrical properties of a- CNx films changes with nitrogen concentration in the film structure. The intensity ratio of the D and G peak (ID/IG) increases with higher nitrogen concentration, which means that sp2-clusters were formed in these films and is responsible for the enhancement of conductivity of the a-CNx films. We observed that the amorphous carbon (a-C) films becoming more graphitic in nature yielding higher conductivity/lower resistivity with increase of nitrogen concentration. Electron field emission result shows that the emission current density enhances with nitrogen doping that indicates the useful in electron field emission devices application.
LanguageEnglish
Pages1845-1848
JournalCurrent Applied Physics
Volume14
DOIs
Publication statusPublished - 26 Oct 2014

Fingerprint

electrical properties
nitrogen
carbon
thin films
electronics
electron emission
field emission
low conductivity
pulsed laser deposition
methane
current density
conductivity
electrical resistivity
augmentation
silicon
gases

Keywords

  • a-CNx thin film
  • Resistivity
  • Electron field emission
  • Raman spectroscopy

Cite this

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abstract = "Nitrogen-doped amorphous carbon thin films (a-CNx) were prepared on silicon substrate by pulsed laser deposition process using methane (CH4) and nitrogen (N2) as source gas. The electrical properties of a- CNx films changes with nitrogen concentration in the film structure. The intensity ratio of the D and G peak (ID/IG) increases with higher nitrogen concentration, which means that sp2-clusters were formed in these films and is responsible for the enhancement of conductivity of the a-CNx films. We observed that the amorphous carbon (a-C) films becoming more graphitic in nature yielding higher conductivity/lower resistivity with increase of nitrogen concentration. Electron field emission result shows that the emission current density enhances with nitrogen doping that indicates the useful in electron field emission devices application.",
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Electrical and electronic properties of nitrogen doped amorphous carbon (a-CNx) thin films. / Ray, SC; Mbiombi, W; Papakonstantinou, P.

In: Current Applied Physics, Vol. 14, 26.10.2014, p. 1845-1848.

Research output: Contribution to journalArticle

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AB - Nitrogen-doped amorphous carbon thin films (a-CNx) were prepared on silicon substrate by pulsed laser deposition process using methane (CH4) and nitrogen (N2) as source gas. The electrical properties of a- CNx films changes with nitrogen concentration in the film structure. The intensity ratio of the D and G peak (ID/IG) increases with higher nitrogen concentration, which means that sp2-clusters were formed in these films and is responsible for the enhancement of conductivity of the a-CNx films. We observed that the amorphous carbon (a-C) films becoming more graphitic in nature yielding higher conductivity/lower resistivity with increase of nitrogen concentration. Electron field emission result shows that the emission current density enhances with nitrogen doping that indicates the useful in electron field emission devices application.

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