Effect of air post contamination on mechanical properties of amorphous carbon nitride thin films

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@article{874e898c1cb04da8baabdc2f1f79a77d,

title = "Effect of air post contamination on mechanical properties of amorphous carbon nitride thin films",

author = "M. Lejeune and M. Benlahsen and P. Lemoine",

year = "2005",

month = aug,

day = "1",

doi = "10.1016/j.ssc.2005.05.025",

language = "English",

volume = "135",

pages = "434--439",

journal = "Solid State Communications",

issn = "0038-1098",

publisher = "Elsevier Ltd",

number = "7",

}

TY - JOUR

T1 - Effect of air post contamination on mechanical properties of amorphous carbon nitride thin films

AU - Lejeune, M.

AU - Benlahsen, M.

AU - Lemoine, P.

PY - 2005/8/1

Y1 - 2005/8/1

U2 - 10.1016/j.ssc.2005.05.025

DO - 10.1016/j.ssc.2005.05.025

M3 - Article

SN - 0038-1098

VL - 135

SP - 434

EP - 439

JO - Solid State Communications

JF - Solid State Communications

IS - 7

ER -