Original language | English |
---|---|
Pages (from-to) | 434-439 |
Journal | Solid State Communications |
Volume | 135 |
Issue number | 7 |
DOIs | |
Publication status | Published (in print/issue) - 1 Aug 2005 |
Effect of air post contamination on mechanical properties of amorphous carbon nitride thin films
M. Lejeune, M. Benlahsen, P. Lemoine
Research output: Contribution to journal › Article › peer-review
31
Citations
(Scopus)