Effect of air post contamination on mechanical properties of amorphous carbon nitride thin films

M. Lejeune, M. Benlahsen, P. Lemoine

Research output: Contribution to journalArticlepeer-review

31 Citations (Scopus)
Original languageEnglish
Pages (from-to)434-439
JournalSolid State Communications
Volume135
Issue number7
DOIs
Publication statusPublished (in print/issue) - 1 Aug 2005

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