Dynamic analysis of flexural vibration mode of an atomic force microscope cantilever with a sidewall probe in liquid

Amir F Payam, Nguyen Duy Vy

Research output: Contribution to journalArticlepeer-review

Abstract

In this paper, dynamic behavior and the resonance frequencies of flexural vibration modes of an atomic force microscope cantilever with sidewall probe immersed in liquid to surface stiffness variations have been investigated and a closed-form expression is derived. Using numerical analysis, the flexural resonance frequencies of microcantilever immersed in liquid are calculated and the results are compared with the air environment. Then, the effect of sidewall length and normal stiffness on the frequency is investigated. Moreover, the surface-coupled effect between the cantilever and simple surface when the cantilever is close to the surface is considered and its effect on the quality factors of the first to fourth modes is studied. [Abstract copyright: © 2020 Wiley Periodicals LLC.]
Original languageEnglish
JournalMicroscopy research and technique
Early online date6 Nov 2020
DOIs
Publication statusE-pub ahead of print - 6 Nov 2020

Keywords

  • analytical method
  • atomic force microscope
  • hydrodynamic effect
  • mode sensitivity
  • sidewall cantilever

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