Diamond like carbon (DLC) thin films: Preparation and Characterization

SC Ray, W Mbiombi, P Papakonstantinou

Research output: Contribution to journalArticle

Abstract

Diamond-like carbon (DLC) thin films are prepared using plasma enhanced chemicalvapour deposition (PECVD) process at different bias voltage. We have studied their microstructuraland electrical properties using Raman spectroscopy and current (I) – voltage (V) relationships.Electrical conductivity is gradually decreases with bias voltage as the films are becoming more andmore diamond like carbon as observed from Raman spectroscopy results. Raman spectroscopyresult shows that the ID/IG ratio gradually decreases indicating formation of more diamond likecarbon films that responsible for the decrease of conductivity of the films. The full width halfmaximum of G peak increase with increase the bias voltage indicating the ring-like sp2 transformsto sp2 chains and raises the amount of sp3-chains. The structural disorder arises from the bond angle and bond length distortions in amorphous carbon films. Thus the structural disorder and mechanical properties such as hardness and elastic modulus increase with bias voltage
LanguageEnglish
Pages292-295
JournalApplied Mechanics and Materials
Volume575
DOIs
Publication statusPublished - 25 Jun 2014

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diamonds
preparation
carbon
electric potential
thin films
Raman spectroscopy
disorders
diamond films
modulus of elasticity
hardness
electrical properties
mechanical properties
conductivity
electrical resistivity
rings

Keywords

  • DLC
  • Raman
  • electrical measurements

Cite this

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Diamond like carbon (DLC) thin films: Preparation and Characterization. / Ray, SC; Mbiombi, W; Papakonstantinou, P.

In: Applied Mechanics and Materials, Vol. 575, 25.06.2014, p. 292-295.

Research output: Contribution to journalArticle

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AU - Mbiombi, W

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AB - Diamond-like carbon (DLC) thin films are prepared using plasma enhanced chemicalvapour deposition (PECVD) process at different bias voltage. We have studied their microstructuraland electrical properties using Raman spectroscopy and current (I) – voltage (V) relationships.Electrical conductivity is gradually decreases with bias voltage as the films are becoming more andmore diamond like carbon as observed from Raman spectroscopy results. Raman spectroscopyresult shows that the ID/IG ratio gradually decreases indicating formation of more diamond likecarbon films that responsible for the decrease of conductivity of the films. The full width halfmaximum of G peak increase with increase the bias voltage indicating the ring-like sp2 transformsto sp2 chains and raises the amount of sp3-chains. The structural disorder arises from the bond angle and bond length distortions in amorphous carbon films. Thus the structural disorder and mechanical properties such as hardness and elastic modulus increase with bias voltage

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