Design of a hybrid closed loop control system for a MEMS accelerometer using backstepping principle

Amir Farokh Payam, Faezeh Arab Hassani, Morteza Fathipour

Research output: Contribution to conference › Paper

4 Citations (Scopus)

Language	English
Publication status	Published - 2007
Event	Internatonal Conference on Microelectronics - Duration: 29 Dec 2007 → 31 Dec 2007

Conference	Internatonal Conference on Microelectronics
Period	29/12/07 → 31/12/07

Farokh Payam, Amir ; Arab Hassani, Faezeh ; Fathipour, Morteza. / Design of a hybrid closed loop control system for a MEMS accelerometer using backstepping principle. Paper presented at Internatonal Conference on Microelectronics, .

@conference{56e56b1f49e8443aada5aff28b0fbdb6,

title = "Design of a hybrid closed loop control system for a MEMS accelerometer using backstepping principle",

author = "{Farokh Payam}, Amir and {Arab Hassani}, Faezeh and Morteza Fathipour",

year = "2007",

language = "English",

note = "Internatonal Conference on Microelectronics ; Conference date: 29-12-2007 Through 31-12-2007",

}

Farokh Payam, A, Arab Hassani, F & Fathipour, M 2007, 'Design of a hybrid closed loop control system for a MEMS accelerometer using backstepping principle' Paper presented at Internatonal Conference on Microelectronics, 29/12/07 - 31/12/07, .

2007. Paper presented at Internatonal Conference on Microelectronics, .

Research output: Contribution to conference › Paper

TY - CONF

T1 - Design of a hybrid closed loop control system for a MEMS accelerometer using backstepping principle

AU - Farokh Payam, Amir

AU - Arab Hassani, Faezeh

AU - Fathipour, Morteza

PY - 2007

Y1 - 2007

M3 - Paper

ER -