Design of a hybrid closed loop control system for a MEMS accelerometer using backstepping principle

Amir Farokh Payam, Faezeh Arab Hassani, Morteza Fathipour

Research output: Contribution to conference › Paper › peer-review

Original language	English
Publication status	Published (in print/issue) - 2007
Event	Internatonal Conference on Microelectronics - Duration: 29 Dec 2007 → 31 Dec 2007

Conference	Internatonal Conference on Microelectronics
Period	29/12/07 → 31/12/07

Cite this

@conference{56e56b1f49e8443aada5aff28b0fbdb6,

title = "Design of a hybrid closed loop control system for a MEMS accelerometer using backstepping principle",

author = "{Farokh Payam}, Amir and {Arab Hassani}, Faezeh and Morteza Fathipour",

year = "2007",

language = "English",

note = "Internatonal Conference on Microelectronics ; Conference date: 29-12-2007 Through 31-12-2007",

}