Design of a hybrid closed loop control system for a MEMS accelerometer using backstepping principle

Amir Farokh Payam, Faezeh Arab Hassani, Morteza Fathipour

Research output: Contribution to conferencePaperpeer-review

4 Citations (Scopus)
Original languageEnglish
Publication statusPublished (in print/issue) - 2007
EventInternatonal Conference on Microelectronics -
Duration: 29 Dec 200731 Dec 2007


ConferenceInternatonal Conference on Microelectronics

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