Design and development of multiple sensor array based on SnO2 thin films for e-nose application

P. K. Sharma; N. Ramgir; C. P. Goyal; N. Datta; S. Kailasaganapathi; M. Kaur; A. K. Debnath; D. K. Aswal; S. K. Gupta

doi:10.1063/1.4810684

Design and development of multiple sensor array based on SnO₂ thin films for e-nose application

P. K. Sharma, N. Ramgir, C. P. Goyal, N. Datta, S. Kailasaganapathi, M. Kaur, A. K. Debnath, D. K. Aswal, S. K. Gupta

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

Fabrication of a 2 × 4 multiple sensor array based on SnO₂ thin films was demonstrated. SnO₂ thin films were deposited on Al₂O₃ substrates and modified selectively using Au and CuO by sputtering. The sensor array was tested for its gas sensing characteristics towards H₂S. The maximum sensor response (S=52) was observed in case of Au modified SnO₂ thin films. By the surface modification using Au there is increase in the sensor response at all temperature. With the increase in temperature, sensor response decreases.

Original language	English
Title of host publication	Proceeding of International Conference on Recent Trends in Applied Physics and Material Science, RAM 2013
Publisher	American Institute of Physics Inc.
Pages	1229-1230
Number of pages	2
Volume	1536
ISBN (Print)	9780735411609
DOIs	https://doi.org/10.1063/1.4810684
Publication status	Published (in print/issue) - 18 Jul 2013
Event	International Conference on Recent Trends in Applied Physics and Material Science, RAM 2013 - Bikaner, Rajasthan, India Duration: 1 Feb 2013 → 2 Feb 2013

Conference

Conference	International Conference on Recent Trends in Applied Physics and Material Science, RAM 2013
Country/Territory	India
City	Bikaner, Rajasthan
Period	1/02/13 → 2/02/13

Keywords

Multiple Sensor Array
SnO
sputtering
thermal deposition
thin films

Access to Document

10.1063/1.4810684

Cite this

Sharma, P. K., Ramgir, N., Goyal, C. P., Datta, N., Kailasaganapathi, S., Kaur, M., Debnath, A. K., Aswal, D. K., & Gupta, S. K. (2013). Design and development of multiple sensor array based on SnO₂ thin films for e-nose application. In Proceeding of International Conference on Recent Trends in Applied Physics and Material Science, RAM 2013 (Vol. 1536, pp. 1229-1230). American Institute of Physics Inc.. https://doi.org/10.1063/1.4810684

@inproceedings{e6680ee96eb64b25afcc90b81267158d,

title = "Design and development of multiple sensor array based on SnO2 thin films for e-nose application",

abstract = "Fabrication of a 2 × 4 multiple sensor array based on SnO2 thin films was demonstrated. SnO2 thin films were deposited on Al2O3 substrates and modified selectively using Au and CuO by sputtering. The sensor array was tested for its gas sensing characteristics towards H2S. The maximum sensor response (S=52) was observed in case of Au modified SnO2 thin films. By the surface modification using Au there is increase in the sensor response at all temperature. With the increase in temperature, sensor response decreases.",

keywords = "Multiple Sensor Array, SnO, sputtering, thermal deposition, thin films",

author = "Sharma, {P. K.} and N. Ramgir and Goyal, {C. P.} and N. Datta and S. Kailasaganapathi and M. Kaur and Debnath, {A. K.} and Aswal, {D. K.} and Gupta, {S. K.}",

year = "2013",

month = jul,

day = "18",

doi = "10.1063/1.4810684",

language = "English",

isbn = "9780735411609",

volume = "1536",

pages = "1229--1230",

booktitle = "Proceeding of International Conference on Recent Trends in Applied Physics and Material Science, RAM 2013",

publisher = "American Institute of Physics Inc.",

note = "International Conference on Recent Trends in Applied Physics and Material Science, RAM 2013 ; Conference date: 01-02-2013 Through 02-02-2013",

}

Sharma, PK, Ramgir, N, Goyal, CP, Datta, N, Kailasaganapathi, S, Kaur, M, Debnath, AK, Aswal, DK & Gupta, SK 2013, Design and development of multiple sensor array based on SnO₂ thin films for e-nose application. in Proceeding of International Conference on Recent Trends in Applied Physics and Material Science, RAM 2013. vol. 1536, American Institute of Physics Inc., pp. 1229-1230, International Conference on Recent Trends in Applied Physics and Material Science, RAM 2013, Bikaner, Rajasthan, India, 1/02/13. https://doi.org/10.1063/1.4810684

Design and development of multiple sensor array based on SnO₂ thin films for e-nose application. / Sharma, P. K.; Ramgir, N.; Goyal, C. P. et al.
Proceeding of International Conference on Recent Trends in Applied Physics and Material Science, RAM 2013. Vol. 1536 American Institute of Physics Inc., 2013. p. 1229-1230.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Design and development of multiple sensor array based on SnO2 thin films for e-nose application

AU - Sharma, P. K.

AU - Ramgir, N.

AU - Goyal, C. P.

AU - Datta, N.

AU - Kailasaganapathi, S.

AU - Kaur, M.

AU - Debnath, A. K.

AU - Aswal, D. K.

AU - Gupta, S. K.

PY - 2013/7/18

Y1 - 2013/7/18

N2 - Fabrication of a 2 × 4 multiple sensor array based on SnO2 thin films was demonstrated. SnO2 thin films were deposited on Al2O3 substrates and modified selectively using Au and CuO by sputtering. The sensor array was tested for its gas sensing characteristics towards H2S. The maximum sensor response (S=52) was observed in case of Au modified SnO2 thin films. By the surface modification using Au there is increase in the sensor response at all temperature. With the increase in temperature, sensor response decreases.

AB - Fabrication of a 2 × 4 multiple sensor array based on SnO2 thin films was demonstrated. SnO2 thin films were deposited on Al2O3 substrates and modified selectively using Au and CuO by sputtering. The sensor array was tested for its gas sensing characteristics towards H2S. The maximum sensor response (S=52) was observed in case of Au modified SnO2 thin films. By the surface modification using Au there is increase in the sensor response at all temperature. With the increase in temperature, sensor response decreases.

KW - Multiple Sensor Array

KW - SnO

KW - sputtering

KW - thermal deposition

KW - thin films

UR - http://www.scopus.com/inward/record.url?scp=84880128691&partnerID=8YFLogxK

U2 - 10.1063/1.4810684

DO - 10.1063/1.4810684

M3 - Conference contribution

AN - SCOPUS:84880128691

SN - 9780735411609

VL - 1536

SP - 1229

EP - 1230

BT - Proceeding of International Conference on Recent Trends in Applied Physics and Material Science, RAM 2013

PB - American Institute of Physics Inc.

T2 - International Conference on Recent Trends in Applied Physics and Material Science, RAM 2013

Y2 - 1 February 2013 through 2 February 2013

ER -