Design and development of multiple sensor array based on SnO2 thin films for e-nose application

P. K. Sharma, N. Ramgir, C. P. Goyal, N. Datta, S. Kailasaganapathi, M. Kaur, A. K. Debnath, D. K. Aswal, S. K. Gupta

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Fabrication of a 2 × 4 multiple sensor array based on SnO2 thin films was demonstrated. SnO2 thin films were deposited on Al2O3 substrates and modified selectively using Au and CuO by sputtering. The sensor array was tested for its gas sensing characteristics towards H2S. The maximum sensor response (S=52) was observed in case of Au modified SnO2 thin films. By the surface modification using Au there is increase in the sensor response at all temperature. With the increase in temperature, sensor response decreases.

Original languageEnglish
Title of host publicationProceeding of International Conference on Recent Trends in Applied Physics and Material Science, RAM 2013
PublisherAmerican Institute of Physics Inc.
Pages1229-1230
Number of pages2
Volume1536
ISBN (Print)9780735411609
DOIs
Publication statusPublished - 18 Jul 2013
EventInternational Conference on Recent Trends in Applied Physics and Material Science, RAM 2013 - Bikaner, Rajasthan, India
Duration: 1 Feb 20132 Feb 2013

Conference

ConferenceInternational Conference on Recent Trends in Applied Physics and Material Science, RAM 2013
CountryIndia
CityBikaner, Rajasthan
Period1/02/132/02/13

Keywords

  • Multiple Sensor Array
  • SnO
  • sputtering
  • thermal deposition
  • thin films

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    Sharma, P. K., Ramgir, N., Goyal, C. P., Datta, N., Kailasaganapathi, S., Kaur, M., Debnath, A. K., Aswal, D. K., & Gupta, S. K. (2013). Design and development of multiple sensor array based on SnO2 thin films for e-nose application. In Proceeding of International Conference on Recent Trends in Applied Physics and Material Science, RAM 2013 (Vol. 1536, pp. 1229-1230). American Institute of Physics Inc.. https://doi.org/10.1063/1.4810684