Depth-sensitive analysis of a degraded tin oxide electrode surface in a plasma device application

Engineering & Materials Science

• Plasma devices 100%
• Tin oxides 76%
• Electrodes 42%
• Plasmas 34%
• Conductive films 27%
• Energy dispersive X ray analysis 27%
• Atomic force microscopy 23%
• Nanoindentation 22%
• Electrons 18%
• Thin films 17%
• Oxides 15%
• Elastic moduli 15%
• Scanning electron microscopy 14%
• Hardness 14%
• Microstructure 12%

Chemistry

• Tin Oxide 59%
• Surface Damage 41%
• Young Modulus 40%
• Plasma 34%
• Behavior as Electrode 27%
• Energy 26%
• Atomic Force Microscopy 21%
• Microstructure 18%
• Surface 17%
• Application 17%
• Scanning Electron Microscopy 16%
• Electron Particle 15%
• Oxide 14%

Physics & Astronomy

• tin oxides 53%
• electrodes 34%
• nanoindentation 18%
• light emission 17%
• incidence 14%
• modulus of elasticity 14%
• hardness 14%
• atomic force microscopy 14%
• damage 13%
• scanning electron microscopy 12%
• oxides 11%
• microstructure 10%
• thin films 9%
• x rays 8%
• energy 5%