Deposition of carbon films onto metal and silicon substrates by filtered cathodic vacuum arc, plasma enhanced CVD and unbalanced magnetron sputtering

I Ahmad, PD Maguire, P Lemoine, SS Roy, JAD McLaughlin

Research output: Contribution to journal › Article › peer-review

25 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Deposition of carbon films onto metal and silicon substrates by filtered cathodic vacuum arc, plasma enhanced CVD and unbalanced magnetron sputtering'. Together they form a unique fingerprint.

Engineering & Materials Science

Chemistry