Customized magnetic traps were developed to produce a domain of dense plasmas with a narrow ion beam directed to a particular area of the processed substrate. A planar magnetron coupled with an arc discharge source created the magnetic traps to confine the plasma electrons and generate the ion beam with the controlled ratio of ion-to-neutral fluxes. Images of the plasma jet patterns and numerical vizualizations help explaining the observed phenomena.
|Journal||IEEE Transactions on Plasma Science|
|Publication status||Published - 1 Oct 2014|
Baranov, O., Zhong, X., Fang, J., Kumar, S., Xu, S., Cvelbar, U., Mariotti, D., & Ostrikov, K. (2014). Dense Plasmas in Magnetic Traps: Generation of Focused Ion Beams With Controlled Ion-to-Neutral Flux Ratios. IEEE Transactions on Plasma Science, 42, 2518-2519.