Dense Plasmas in Magnetic Traps: Generation of Focused Ion Beams With Controlled Ion-to-Neutral Flux Ratios

O Baranov, X Zhong, J Fang, S Kumar, S Xu, U Cvelbar, D Mariotti, K Ostrikov

Research output: Contribution to journalArticle

2 Citations (Scopus)

Abstract

Customized magnetic traps were developed to produce a domain of dense plasmas with a narrow ion beam directed to a particular area of the processed substrate. A planar magnetron coupled with an arc discharge source created the magnetic traps to confine the plasma electrons and generate the ion beam with the controlled ratio of ion-to-neutral fluxes. Images of the plasma jet patterns and numerical vizualizations help explaining the observed phenomena.
LanguageEnglish
Pages2518-2519
JournalIEEE Transactions on Plasma Science
Volume42
Publication statusPublished - 1 Oct 2014

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dense plasmas
ion beams
traps
arc discharges
electron plasma
plasma jets
ions

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Baranov, O., Zhong, X., Fang, J., Kumar, S., Xu, S., Cvelbar, U., ... Ostrikov, K. (2014). Dense Plasmas in Magnetic Traps: Generation of Focused Ion Beams With Controlled Ion-to-Neutral Flux Ratios. IEEE Transactions on Plasma Science, 42, 2518-2519.
Baranov, O ; Zhong, X ; Fang, J ; Kumar, S ; Xu, S ; Cvelbar, U ; Mariotti, D ; Ostrikov, K. / Dense Plasmas in Magnetic Traps: Generation of Focused Ion Beams With Controlled Ion-to-Neutral Flux Ratios. In: IEEE Transactions on Plasma Science. 2014 ; Vol. 42. pp. 2518-2519.
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Baranov, O, Zhong, X, Fang, J, Kumar, S, Xu, S, Cvelbar, U, Mariotti, D & Ostrikov, K 2014, 'Dense Plasmas in Magnetic Traps: Generation of Focused Ion Beams With Controlled Ion-to-Neutral Flux Ratios', IEEE Transactions on Plasma Science, vol. 42, pp. 2518-2519.

Dense Plasmas in Magnetic Traps: Generation of Focused Ion Beams With Controlled Ion-to-Neutral Flux Ratios. / Baranov, O; Zhong, X; Fang, J; Kumar, S; Xu, S; Cvelbar, U; Mariotti, D; Ostrikov, K.

In: IEEE Transactions on Plasma Science, Vol. 42, 01.10.2014, p. 2518-2519.

Research output: Contribution to journalArticle

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AU - Baranov, O

AU - Zhong, X

AU - Fang, J

AU - Kumar, S

AU - Xu, S

AU - Cvelbar, U

AU - Mariotti, D

AU - Ostrikov, K

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