Dense Plasmas in Magnetic Traps: Generation of Focused Ion Beams With Controlled Ion-to-Neutral Flux Ratios

O Baranov, X Zhong, J Fang, S Kumar, S Xu, U Cvelbar, D Mariotti, K Ostrikov

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2 Citations (Scopus)
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Abstract

Customized magnetic traps were developed to produce a domain of dense plasmas with a narrow ion beam directed to a particular area of the processed substrate. A planar magnetron coupled with an arc discharge source created the magnetic traps to confine the plasma electrons and generate the ion beam with the controlled ratio of ion-to-neutral fluxes. Images of the plasma jet patterns and numerical vizualizations help explaining the observed phenomena.
Original languageEnglish
Pages (from-to)2518-2519
JournalIEEE Transactions on Plasma Science
Volume42
Publication statusPublished - 1 Oct 2014

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    Baranov, O., Zhong, X., Fang, J., Kumar, S., Xu, S., Cvelbar, U., Mariotti, D., & Ostrikov, K. (2014). Dense Plasmas in Magnetic Traps: Generation of Focused Ion Beams With Controlled Ion-to-Neutral Flux Ratios. IEEE Transactions on Plasma Science, 42, 2518-2519.