Engineering & Materials Science
Ruthenium
100%
Cobalt
76%
Atomic layer deposition
21%
Metals
15%
Nitrogen plasma
8%
Ultrahigh vacuum
7%
Gibbs free energy
6%
Surface structure
5%
Thermal effects
4%
Thin films
4%
Plasmas
4%
Thermodynamics
4%
Chemical analysis
3%
Physics & Astronomy
ruthenium
81%
cobalt
61%
atomic layer epitaxy
15%
metal surfaces
10%
metals
7%
saturation
7%
nitrogen plasma
6%
Gibbs free energy
6%
reactivity
5%
ultrahigh vacuum
5%
temperature effects
4%
hollow
4%
thermodynamics
3%
thin films
2%
pulses
2%
energy
1%
Chemistry
Surface
21%
Atomic Layer Epitaxy
16%
Metal
8%
Hexagonal Space Group
7%
Surface Structure
4%
Polycrystalline Solid
4%
Vacuum
3%
Gibbs Free Energy
3%
Thermodynamics
2%
Plasma
2%
Nitrogen
2%
Energy
2%
Mixture
2%