Coverage and Stability of NHx-Terminated Cobalt and Ruthenium Surfaces: A First-Principles Investigation

Engineering & Materials Science

• Ruthenium 100%
• Cobalt 76%
• Atomic layer deposition 21%
• Metals 15%
• Nitrogen plasma 8%
• Ultrahigh vacuum 7%
• Gibbs free energy 6%
• Surface structure 5%
• Thermal effects 4%
• Thin films 4%
• Plasmas 4%
• Thermodynamics 4%
• Chemical analysis 3%

Physics & Astronomy

• ruthenium 81%
• cobalt 61%
• atomic layer epitaxy 15%
• metal surfaces 10%
• metals 7%
• saturation 7%
• nitrogen plasma 6%
• Gibbs free energy 6%
• reactivity 5%
• ultrahigh vacuum 5%
• temperature effects 4%
• hollow 4%
• thermodynamics 3%
• thin films 2%
• pulses 2%
• energy 1%

Chemistry

• Surface 21%
• Atomic Layer Epitaxy 16%
• Metal 8%
• Hexagonal Space Group 7%
• Surface Structure 4%
• Polycrystalline Solid 4%
• Vacuum 3%
• Gibbs Free Energy 3%
• Thermodynamics 2%
• Plasma 2%
• Nitrogen 2%
• Energy 2%
• Mixture 2%