Control of the Cu morphology on Ru-passivated and Ru-doped TaN surfaces – promoting growth of 2D conducting copper for CMOS interconnects

  • Cara-Lena Nies
  • , Suresh Kondati Natarajan
  • , Michael Nolan

Research output: Contribution to journal › Article › peer-review

16   Link opens in a new tab Citations (Scopus)
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