Continuity and topography of ultrathin diamond-like carbon films characterized by scanning electron microscopy/energy dispersive x-ray analysis and atomic force microscopy

P Lemoine; JM Mc Laughlin

doi:10.1116/1.581570

Continuity and topography of ultrathin diamond-like carbon films characterized by scanning electron microscopy/energy dispersive x-ray analysis and atomic force microscopy

P Lemoine
, JM Mc Laughlin

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	176-182
Number of pages	7
Journal	Journal of Vacuum Science and Technology A
Volume	17
Issue number	1
DOIs	https://doi.org/10.1116/1.581570
Publication status	Published (in print/issue) - 1999

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10.1116/1.581570

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title = "Continuity and topography of ultrathin diamond-like carbon films characterized by scanning electron microscopy/energy dispersive x-ray analysis and atomic force microscopy",

author = "P Lemoine and \{Mc Laughlin\}, JM",

year = "1999",

doi = "10.1116/1.581570",

language = "English",

volume = "17",

pages = "176--182",

journal = "Journal of Vacuum Science and Technology A",

issn = "0734-2101",

publisher = "AVS Science and Technology Society",

number = "1",

}

TY - JOUR

T1 - Continuity and topography of ultrathin diamond-like carbon films characterized by scanning electron microscopy/energy dispersive x-ray analysis and atomic force microscopy

AU - Lemoine, P

AU - Mc Laughlin, JM

PY - 1999

Y1 - 1999

U2 - 10.1116/1.581570

DO - 10.1116/1.581570

M3 - Article

SN - 0734-2101

VL - 17

SP - 176

EP - 182

JO - Journal of Vacuum Science and Technology A

JF - Journal of Vacuum Science and Technology A

IS - 1

ER -