Continuity and topography of ultrathin diamond-like carbon films characterized by scanning electron microscopy/energy dispersive x-ray analysis and atomic force microscopy

P Lemoine, JM Mc Laughlin

Research output: Contribution to journalArticlepeer-review

6 Citations (Scopus)
Original languageEnglish
Pages (from-to)176-182
Number of pages7
JournalJournal of Vacuum Science and Technology A
Issue number1
Publication statusPublished (in print/issue) - 1999

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