| Original language | English |
|---|---|
| Title of host publication | Unknown Host Publication |
| Pages | 438-442 |
| Number of pages | 5 |
| Publication status | Published (in print/issue) - 1999 |
| Event | Semiconductor Wafer Bonding: Science, Technology and Applications V - Honolulu Duration: 1 Jan 1999 → … |
Conference
| Conference | Semiconductor Wafer Bonding: Science, Technology and Applications V |
|---|---|
| Period | 1/01/99 → … |