Characterization of hollow cathode and parallel plate microplasmas: scaling and breakdown

J Greenan, CMO Mahony, D Mariotti, PD Maguire

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11 Citations (Scopus)
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Abstract

We present an experimental comparison of parallel plate and hollow cathode microplasma structures, operated at high pressure with narrow anode�cathode gaps. A moveable anode arrangement with ±12 µm spatial resolution was used to vary the electrode separation to cover the pd range between 0.01 and 4 Torr cm for both structures. The hollow cathode discharge was operated with pressure�diameter ( pD ) product values between 1.8 and 7.2 Torr cm and an aspect ratio of ~5. Analysis of V � I characteristics shows j / p 2 and j 2 p scaling for low and high current modes, respectively. Electron temperature estimates between 2 and 3 eV were obtained by solving a numerical collisional�radiative model based on transitions from 4p argon levels. The hollow cathode sheath thickness for both ionizing and non-ionizing sheath conditions was determined analytically and the diffusion equation was solved numerically to estimate the plasma density profile for the ionizing sheath case.
Original languageEnglish
Pages (from-to)025011
JournalPlasma Sources Science and Technology
Volume20
Issue number2
Publication statusPublished - 23 Mar 2011

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