Characterisation of thermally annealed diamond like carbon (DLC) and silicon modified DLC films by Raman spectroscopy

AA Ogwu, RW Lamberton, S Morley, PD Maguire, JAD McLaughlin

Research output: Contribution to journalArticle

Abstract

Raman spectroscopy has been used to investigate the structural changes in thermally annealed diamond like carbon (a-C:H) and silicon modified diamond like carbon (a-C:H:Si) films prepared by plasma enhanced chemical vapour deposition (PECVD) using a 514.53 nm argon ion laser excitation. The changes in the Raman spectra of the films has been used to monitor structural modifications with increasing annealing temperature. The present investigation indicates that the rate of these structural modifications is dependent on both the annealing temperature and the negative self-bias voltage applied during the film deposition process for a fixed annealing time. (C) 1999 Elsevier Science B.V. All rights reserved.
Original languageEnglish
Pages (from-to)335-344
JournalPhysica B
Volume269
Issue number3-4
Publication statusPublished - Sep 1999

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Keywords

  • diamond like carbon
  • Raman spectroscopy
  • thermal annealing

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