Abstract
We present a comparative study where carbon nanostructures were prepared by electron and ion beam methods. The deposited thin films were analysed by Raman analysis, nanoindentation, Energy dispersive X-ray analysis (EDX) and atomic force microscopy (AFM). In most conditions, the material formed is hydrogenated amorphous carbon. This study was used to form sharp AFM supertip structures which were successfully used to image sintered ceramic samples.
Original language | English |
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Pages | 237-240 |
Number of pages | 4 |
Publication status | Published (in print/issue) - 2006 |
Event | 2006 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2006 Technical Proceedings - Boston, MA, United States Duration: 7 May 2006 → 11 May 2006 |
Conference
Conference | 2006 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2006 Technical Proceedings |
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Country/Territory | United States |
City | Boston, MA |
Period | 7/05/06 → 11/05/06 |
Bibliographical note
Copyright:Copyright 2008 Elsevier B.V., All rights reserved.
Keywords
- Electron beam induced deposition
- Focused ion beam
- Hydrogenated amorphous carbon
- Nanoindentation
- Raman spectroscopy