c-C4F8Plasmas for the Deposition of Fluorinated Carbon Films

Antonia Terriza; Manuel Macias-Montero; Maria C. López-Santos; Francisco Yubero; José Cotrino; Agustín R. González-Elipe

doi:10.1002/ppap.201300129

c-C4F8Plasmas for the Deposition of Fluorinated Carbon Films

Antonia Terriza
, Manuel Macias-Montero
, Maria C. López-Santos
, Francisco Yubero
, José Cotrino
, Agustín R. González-Elipe

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	289-299
Journal	Plasma Processes and Polymers
Volume	11
Issue number	3
DOIs	https://doi.org/10.1002/ppap.201300129
Publication status	Published (in print/issue) - 2014

Keywords

Plasmas
Fluorinated Carbon Films

Access to Document

10.1002/ppap.201300129

Cite this

@article{dc33f2a33a1b47759cd8714fb586ee63,

title = "c-C4F8Plasmas for the Deposition of Fluorinated Carbon Films",

keywords = "Plasmas, Fluorinated Carbon Films",

author = "Antonia Terriza and Manuel Macias-Montero and L{\'o}pez-Santos, \{Maria C.\} and Francisco Yubero and Jos{\'e} Cotrino and Gonz{\'a}lez-Elipe, \{Agust{\'i}n R.\}",

year = "2014",

doi = "10.1002/ppap.201300129",

language = "English",

volume = "11",

pages = "289--299",

journal = "Plasma Processes and Polymers",

issn = "1612-8869",

publisher = "Wiley-VCH Verlag",

number = "3",

}

TY - JOUR

T1 - c-C4F8Plasmas for the Deposition of Fluorinated Carbon Films

AU - Terriza, Antonia

AU - Macias-Montero, Manuel

AU - López-Santos, Maria C.

AU - Yubero, Francisco

AU - Cotrino, José

AU - González-Elipe, Agustín R.

PY - 2014

Y1 - 2014

KW - Plasmas

KW - Fluorinated Carbon Films

U2 - 10.1002/ppap.201300129

DO - 10.1002/ppap.201300129

M3 - Article

SN - 1612-8869

VL - 11

SP - 289

EP - 299

JO - Plasma Processes and Polymers

JF - Plasma Processes and Polymers

IS - 3

ER -