c-C4F8Plasmas for the Deposition of Fluorinated Carbon Films

Antonia Terriza, Manuel Macias-Montero, Maria C. López-Santos, Francisco Yubero, José Cotrino, Agustín R. González-Elipe

    Research output: Contribution to journalArticlepeer-review

    7 Citations (Scopus)
    Original languageEnglish
    Pages (from-to)289-299
    JournalPlasma Processes and Polymers
    Volume11
    Issue number3
    DOIs
    Publication statusPublished - 2014

    Keywords

    • Plasmas
    • Fluorinated Carbon Films

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