Bonding configurations in DBOP-FCVA nitrogenated tetrahedral amorphous carbon films studied by Raman and X-ray photoelectron spectroscopies

SS Roy, P Papakonstantinou, GA Abbas, R McCann, JP Quinn, JAD McLaughlin

Research output: Contribution to journalArticle

28 Citations (Scopus)

Abstract

Nitrogenated tetrahedral amorphous carbon (ta-C:N) films having nitrogen content from 0 to 10.3 at.%, have been produced by a double bend off-plane filtered cathodic vacuum arc system. X-ray photoelectron and Raman spectroscopies have been applied to study the effect of nitrogen in the bonding structure in the films. Deconvolution of the XPS spectra revealed a decrease in the amount of sp3-bonded carbon in the ta-C:N films. A comparative study between the Raman parameters at 514 and at 633 nm excitation wavelength was presented. Nitrogen (N) incorporation led to a lower G peak position and higher ID/IG ratios, indicating the development of larger sp2 domains. Q (−ve) parameter (which measures the skewness of G line) increased sharply with the increased of N content in the films. The hardness of the films was evaluated by nanoindentation.Copyright Elsevier 2004
LanguageEnglish
Pages1459-1463
JournalDiamond and Related Materials
Volume13
Issue number4-8
DOIs
Publication statusPublished - 2004

Fingerprint

Carbon films
Amorphous carbon
Amorphous films
Nitrogen
X ray photoelectron spectroscopy
Deconvolution
Nanoindentation
Raman spectroscopy
Carbon
Hardness
Vacuum
Wavelength

Keywords

  • Amorphous carbon nitride
  • XPS
  • Raman
  • Nanoindentation

Cite this

@article{02c6715ebd114d5f8b944ea3f608afef,
title = "Bonding configurations in DBOP-FCVA nitrogenated tetrahedral amorphous carbon films studied by Raman and X-ray photoelectron spectroscopies",
abstract = "Nitrogenated tetrahedral amorphous carbon (ta-C:N) films having nitrogen content from 0 to 10.3 at.{\%}, have been produced by a double bend off-plane filtered cathodic vacuum arc system. X-ray photoelectron and Raman spectroscopies have been applied to study the effect of nitrogen in the bonding structure in the films. Deconvolution of the XPS spectra revealed a decrease in the amount of sp3-bonded carbon in the ta-C:N films. A comparative study between the Raman parameters at 514 and at 633 nm excitation wavelength was presented. Nitrogen (N) incorporation led to a lower G peak position and higher ID/IG ratios, indicating the development of larger sp2 domains. Q (−ve) parameter (which measures the skewness of G line) increased sharply with the increased of N content in the films. The hardness of the films was evaluated by nanoindentation.Copyright Elsevier 2004",
keywords = "Amorphous carbon nitride, XPS, Raman, Nanoindentation",
author = "SS Roy and P Papakonstantinou and GA Abbas and R McCann and JP Quinn and JAD McLaughlin",
year = "2004",
doi = "10.1016/j.diamond.2003.11.085",
language = "English",
volume = "13",
pages = "1459--1463",
journal = "Diamond and Related Materials",
issn = "0925-9635",
publisher = "Elsevier",
number = "4-8",

}

Bonding configurations in DBOP-FCVA nitrogenated tetrahedral amorphous carbon films studied by Raman and X-ray photoelectron spectroscopies. / Roy, SS; Papakonstantinou, P; Abbas, GA; McCann, R; Quinn, JP; McLaughlin, JAD.

In: Diamond and Related Materials, Vol. 13, No. 4-8, 2004, p. 1459-1463.

Research output: Contribution to journalArticle

TY - JOUR

T1 - Bonding configurations in DBOP-FCVA nitrogenated tetrahedral amorphous carbon films studied by Raman and X-ray photoelectron spectroscopies

AU - Roy, SS

AU - Papakonstantinou, P

AU - Abbas, GA

AU - McCann, R

AU - Quinn, JP

AU - McLaughlin, JAD

PY - 2004

Y1 - 2004

N2 - Nitrogenated tetrahedral amorphous carbon (ta-C:N) films having nitrogen content from 0 to 10.3 at.%, have been produced by a double bend off-plane filtered cathodic vacuum arc system. X-ray photoelectron and Raman spectroscopies have been applied to study the effect of nitrogen in the bonding structure in the films. Deconvolution of the XPS spectra revealed a decrease in the amount of sp3-bonded carbon in the ta-C:N films. A comparative study between the Raman parameters at 514 and at 633 nm excitation wavelength was presented. Nitrogen (N) incorporation led to a lower G peak position and higher ID/IG ratios, indicating the development of larger sp2 domains. Q (−ve) parameter (which measures the skewness of G line) increased sharply with the increased of N content in the films. The hardness of the films was evaluated by nanoindentation.Copyright Elsevier 2004

AB - Nitrogenated tetrahedral amorphous carbon (ta-C:N) films having nitrogen content from 0 to 10.3 at.%, have been produced by a double bend off-plane filtered cathodic vacuum arc system. X-ray photoelectron and Raman spectroscopies have been applied to study the effect of nitrogen in the bonding structure in the films. Deconvolution of the XPS spectra revealed a decrease in the amount of sp3-bonded carbon in the ta-C:N films. A comparative study between the Raman parameters at 514 and at 633 nm excitation wavelength was presented. Nitrogen (N) incorporation led to a lower G peak position and higher ID/IG ratios, indicating the development of larger sp2 domains. Q (−ve) parameter (which measures the skewness of G line) increased sharply with the increased of N content in the films. The hardness of the films was evaluated by nanoindentation.Copyright Elsevier 2004

KW - Amorphous carbon nitride

KW - XPS

KW - Raman

KW - Nanoindentation

U2 - 10.1016/j.diamond.2003.11.085

DO - 10.1016/j.diamond.2003.11.085

M3 - Article

VL - 13

SP - 1459

EP - 1463

JO - Diamond and Related Materials

T2 - Diamond and Related Materials

JF - Diamond and Related Materials

SN - 0925-9635

IS - 4-8

ER -