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Atmospheric-Microplasma-Assisted Nanofabrication: Metal and Metal-Oxide Nanostructures and Nanoarchitectures

  • D Mariotti
  • , AC Bose
  • , K Ostrikov

Research output: Contribution to journalArticlepeer-review

Abstract

In this paper, we report on the fabrication of Mo-oxide nanostructures and anoarchitectures using an atmospheric-microplasma (AMP) system. This AMP system shows a high degree of flexibility and is capable of producing several different nanostructures and nanoarchitectures by varying the process parameters. The low-cost and simplicity of theprocess are important characteristics for nanomanufacturing, and AMPS offer such advantages. In addition, AMPS have shown the ability of promoting self-organization of nanostructures.
Original languageEnglish
Pages (from-to)1027-1033
JournalIEEE Transactions on Plasma Science
Volume37
Issue number6, Par
Early online date4 Mar 2009
DOIs
Publication statusPublished (in print/issue) - 10 Jun 2009

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