Atmospheric-Microplasma-Assisted Nanofabrication: Metal and Metal-Oxide Nanostructures and Nanoarchitectures

D Mariotti, AC Bose, K Ostrikov

    Research output: Contribution to journalArticle

    39 Citations (Scopus)

    Abstract

    In this paper, we report on the fabrication of Mo-oxide nanostructures and anoarchitectures using an atmospheric-microplasma (AMP) system. This AMP system shows a high degree of flexibility and is capable of producing several different nanostructures and nanoarchitectures by varying the process parameters. The low-cost and simplicity of theprocess are important characteristics for nanomanufacturing, and AMPS offer such advantages. In addition, AMPS have shown the ability of promoting self-organization of nanostructures.
    Original languageEnglish
    Pages (from-to)1027-1033
    JournalIEEE Transactions on Plasma Science
    Volume37
    Issue number6, Par
    Early online date4 Mar 2009
    DOIs
    Publication statusPublished - 10 Jun 2009

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