Atmospheric-Microplasma-Assisted Nanofabrication: Metal and Metal-Oxide Nanostructures and Nanoarchitectures

D Mariotti; AC Bose; K Ostrikov

doi:10.1109/TPS.2009.2014067

Atmospheric-Microplasma-Assisted Nanofabrication: Metal and Metal-Oxide Nanostructures and Nanoarchitectures

D Mariotti, AC Bose, K Ostrikov

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42 Citations (Scopus)

Abstract

In this paper, we report on the fabrication of Mo-oxide nanostructures and anoarchitectures using an atmospheric-microplasma (AMP) system. This AMP system shows a high degree of flexibility and is capable of producing several different nanostructures and nanoarchitectures by varying the process parameters. The low-cost and simplicity of theprocess are important characteristics for nanomanufacturing, and AMPS offer such advantages. In addition, AMPS have shown the ability of promoting self-organization of nanostructures.

Original language	English
Pages (from-to)	1027-1033
Journal	IEEE Transactions on Plasma Science
Volume	37
Issue number	6, Par
Early online date	4 Mar 2009
DOIs	https://doi.org/10.1109/TPS.2009.2014067
Publication status	Published (in print/issue) - 10 Jun 2009

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abstract = "In this paper, we report on the fabrication of Mo-oxide nanostructures and anoarchitectures using an atmospheric-microplasma (AMP) system. This AMP system shows a high degree of flexibility and is capable of producing several different nanostructures and nanoarchitectures by varying the process parameters. The low-cost and simplicity of theprocess are important characteristics for nanomanufacturing, and AMPS offer such advantages. In addition, AMPS have shown the ability of promoting self-organization of nanostructures.",

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AU - Ostrikov, K

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AB - In this paper, we report on the fabrication of Mo-oxide nanostructures and anoarchitectures using an atmospheric-microplasma (AMP) system. This AMP system shows a high degree of flexibility and is capable of producing several different nanostructures and nanoarchitectures by varying the process parameters. The low-cost and simplicity of theprocess are important characteristics for nanomanufacturing, and AMPS offer such advantages. In addition, AMPS have shown the ability of promoting self-organization of nanostructures.

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DO - 10.1109/TPS.2009.2014067

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JO - IEEE Transactions on Plasma Science

JF - IEEE Transactions on Plasma Science

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Atmospheric-Microplasma-Assisted Nanofabrication: Metal and Metal-Oxide Nanostructures and Nanoarchitectures

Abstract

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