Abstract
In this paper we discuss how a better understanding of thermal and mainly non-thermal plasmas provides basis for their application in a number or nanotechnologies. One should bear in mind that one may design unique properties of plasmas thus affecting very directly properties of the resulting nanostructures. A number of examples where plasmas contribute to production of nanomaterials, modification of surfaces and functionalization at nanoscales are given here. Plasmas are not a panacea but in nanotechnology their application may be the best strategy to convert production of individual structures to massively parallel production that may become a viable industrial technology.
| Original language | English |
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| Title of host publication | Unknown Host Publication |
| Publisher | IEEE |
| Pages | 29-36 |
| Number of pages | 8 |
| Publication status | Published (in print/issue) - 2010 |
| Event | 27th International Conference on Microelectronics - Nis, Serbia Duration: 1 Jan 2010 → … |
Conference
| Conference | 27th International Conference on Microelectronics |
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| Period | 1/01/10 → … |