Application of Non-Eqilibrium Plasmas in Top-Down and Bottom-Up Nanotechnologies and Biomedicine

Zoran Petrović, M Radmilovic-Radjenovic, PD Maguire, M Radetic, N Puac, D Maric, B Radjenovic, G Malovic

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

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In this paper we discuss how a better understanding of thermal and mainly non-thermal plasmas provides basis for their application in a number or nanotechnologies. One should bear in mind that one may design unique properties of plasmas thus affecting very directly properties of the resulting nanostructures. A number of examples where plasmas contribute to production of nanomaterials, modification of surfaces and functionalization at nanoscales are given here. Plasmas are not a panacea but in nanotechnology their application may be the best strategy to convert production of individual structures to massively parallel production that may become a viable industrial technology.
Original languageEnglish
Title of host publicationUnknown Host Publication
Number of pages8
Publication statusPublished (in print/issue) - 2010
Event27th International Conference on Microelectronics - Nis, Serbia
Duration: 1 Jan 2010 → …


Conference27th International Conference on Microelectronics
Period1/01/10 → …


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