Application of Non-Eqilibrium Plasmas in Top-Down and Bottom-Up Nanotechnologies and Biomedicine

ZL Petrovic, M Radmilovic-Radjenovic, PD Maguire, M Radetic, N Puac, D Maric, B Radjenovic, G Malovic

Research output: Chapter in Book/Report/Conference proceedingConference contribution

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Abstract

In this paper we discuss how a better understanding of thermal and mainly non-thermal plasmas provides basis for their application in a number or nanotechnologies. One should bear in mind that one may design unique properties of plasmas thus affecting very directly properties of the resulting nanostructures. A number of examples where plasmas contribute to production of nanomaterials, modification of surfaces and functionalization at nanoscales are given here. Plasmas are not a panacea but in nanotechnology their application may be the best strategy to convert production of individual structures to massively parallel production that may become a viable industrial technology.
Original languageEnglish
Title of host publicationUnknown Host Publication
PublisherIEEE
Pages29-36
Number of pages8
Publication statusPublished - 2010
Event27th International Conference on Microelectronics - Nis, Serbia
Duration: 1 Jan 2010 → …

Conference

Conference27th International Conference on Microelectronics
Period1/01/10 → …

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  • Cite this

    Petrovic, ZL., Radmilovic-Radjenovic, M., Maguire, PD., Radetic, M., Puac, N., Maric, D., Radjenovic, B., & Malovic, G. (2010). Application of Non-Eqilibrium Plasmas in Top-Down and Bottom-Up Nanotechnologies and Biomedicine. In Unknown Host Publication (pp. 29-36). IEEE. http://ieeexplore.ieee.org/xpl/conferences.jsp