In this paper we discuss how a better understanding of thermal and mainly non-thermal plasmas provides basis for their application in a number or nanotechnologies. One should bear in mind that one may design unique properties of plasmas thus affecting very directly properties of the resulting nanostructures. A number of examples where plasmas contribute to production of nanomaterials, modification of surfaces and functionalization at nanoscales are given here. Plasmas are not a panacea but in nanotechnology their application may be the best strategy to convert production of individual structures to massively parallel production that may become a viable industrial technology.
|Title of host publication||Unknown Host Publication|
|Number of pages||8|
|Publication status||Published - 2010|
|Event||27th International Conference on Microelectronics - Nis, Serbia|
Duration: 1 Jan 2010 → …
|Conference||27th International Conference on Microelectronics|
|Period||1/01/10 → …|