Anomaly Detection in Batch Manufacturing Processes Using Localized Reconstruction Errors From 1-D Convolutional AutoEncoders

Physics & Astronomy

• manufacturing 79%
• anomalies 76%
• learning 62%
• ground truth 28%
• availability 19%
• boxes 18%
• engineering 14%
• sensors 11%
• metals 9%
• performance 8%

Engineering & Materials Science

• Anomaly detection 100%
• Deep learning 34%
• Semiconductor materials 34%
• Process engineering 23%
• Labeled data 22%
• Unsupervised learning 21%
• Time series 16%
• Availability 13%
• Metals 12%
• Sensors 9%

Chemistry

• Error 72%
• Semiconductor 29%
• Black 17%
• Environment 10%
• Metal 8%