A study of ultra-thin film ion beam deposited (IBD) hydrogenated amorphous carbon (a-C : H) using atomic force microscopy (AFM) and transmission electron microscopy (TEM)

RW Lamberton, JF Zhao, D Magill, JAD McLaughlin, PD Maguire

Research output: Contribution to journalArticle

Abstract

The growing importance of ultra-thin DLC as applied to overcoats for magnetic recording head/slider assemblies for hard disk drive systems requires an in-depth understanding of the fundamental mechanisms occurring during growth. With this aim a characterisation study of ultra-thin film (< 100 nm) hydrocarbon ion beam deposited (IBD) hydrogenated amorphous carbon (a-C:H) has been undertaken. Deposition was carried out onto argon cleaned (100) p-type silicon and Al2O3-TiC (70:30 wt%), the latter of which is commonly employed as a substrate for magnetic recording head/slider fabrication. AFM analysis of 10 nm a-C:H deposited using an energy of 200 eV per carbon atom has identified the generation of surface morphology on silicon during growth that is not observed during a-C:H growth on Al2O3-TiC deposited at the same time. TEM analysis of a similar a-C:H film on silicon suggests that the observed features are nanocrystallites (similar to 75 nm) embedded in a two-phase matrix containing nanocrystalline (< 5 nm) graphite. (C) 1998 Elsevier Science S.A.
LanguageEnglish
Pages1054-1058
JournalDiamond and Related Materials
Volume7
Issue number7
Publication statusPublished - Jul 1998

Fingerprint

recording heads
ion beams
atomic force microscopy
magnetic recording
chutes
transmission electron microscopy
carbon
silicon
thin films
assemblies
graphite
hydrocarbons
argon
fabrication
matrices
atoms
energy

Keywords

  • ultra-thin film DLC
  • magnetic recording head
  • TEM
  • AFM

Cite this

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title = "A study of ultra-thin film ion beam deposited (IBD) hydrogenated amorphous carbon (a-C : H) using atomic force microscopy (AFM) and transmission electron microscopy (TEM)",
abstract = "The growing importance of ultra-thin DLC as applied to overcoats for magnetic recording head/slider assemblies for hard disk drive systems requires an in-depth understanding of the fundamental mechanisms occurring during growth. With this aim a characterisation study of ultra-thin film (< 100 nm) hydrocarbon ion beam deposited (IBD) hydrogenated amorphous carbon (a-C:H) has been undertaken. Deposition was carried out onto argon cleaned (100) p-type silicon and Al2O3-TiC (70:30 wt{\%}), the latter of which is commonly employed as a substrate for magnetic recording head/slider fabrication. AFM analysis of 10 nm a-C:H deposited using an energy of 200 eV per carbon atom has identified the generation of surface morphology on silicon during growth that is not observed during a-C:H growth on Al2O3-TiC deposited at the same time. TEM analysis of a similar a-C:H film on silicon suggests that the observed features are nanocrystallites (similar to 75 nm) embedded in a two-phase matrix containing nanocrystalline (< 5 nm) graphite. (C) 1998 Elsevier Science S.A.",
keywords = "ultra-thin film DLC, magnetic recording head, TEM, AFM",
author = "RW Lamberton and JF Zhao and D Magill and JAD McLaughlin and PD Maguire",
note = "Diamond 97 Conference, EDINBURGH, SCOTLAND, AUG 03-08, 1997",
year = "1998",
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T1 - A study of ultra-thin film ion beam deposited (IBD) hydrogenated amorphous carbon (a-C : H) using atomic force microscopy (AFM) and transmission electron microscopy (TEM)

AU - Lamberton, RW

AU - Zhao, JF

AU - Magill, D

AU - McLaughlin, JAD

AU - Maguire, PD

N1 - Diamond 97 Conference, EDINBURGH, SCOTLAND, AUG 03-08, 1997

PY - 1998/7

Y1 - 1998/7

N2 - The growing importance of ultra-thin DLC as applied to overcoats for magnetic recording head/slider assemblies for hard disk drive systems requires an in-depth understanding of the fundamental mechanisms occurring during growth. With this aim a characterisation study of ultra-thin film (< 100 nm) hydrocarbon ion beam deposited (IBD) hydrogenated amorphous carbon (a-C:H) has been undertaken. Deposition was carried out onto argon cleaned (100) p-type silicon and Al2O3-TiC (70:30 wt%), the latter of which is commonly employed as a substrate for magnetic recording head/slider fabrication. AFM analysis of 10 nm a-C:H deposited using an energy of 200 eV per carbon atom has identified the generation of surface morphology on silicon during growth that is not observed during a-C:H growth on Al2O3-TiC deposited at the same time. TEM analysis of a similar a-C:H film on silicon suggests that the observed features are nanocrystallites (similar to 75 nm) embedded in a two-phase matrix containing nanocrystalline (< 5 nm) graphite. (C) 1998 Elsevier Science S.A.

AB - The growing importance of ultra-thin DLC as applied to overcoats for magnetic recording head/slider assemblies for hard disk drive systems requires an in-depth understanding of the fundamental mechanisms occurring during growth. With this aim a characterisation study of ultra-thin film (< 100 nm) hydrocarbon ion beam deposited (IBD) hydrogenated amorphous carbon (a-C:H) has been undertaken. Deposition was carried out onto argon cleaned (100) p-type silicon and Al2O3-TiC (70:30 wt%), the latter of which is commonly employed as a substrate for magnetic recording head/slider fabrication. AFM analysis of 10 nm a-C:H deposited using an energy of 200 eV per carbon atom has identified the generation of surface morphology on silicon during growth that is not observed during a-C:H growth on Al2O3-TiC deposited at the same time. TEM analysis of a similar a-C:H film on silicon suggests that the observed features are nanocrystallites (similar to 75 nm) embedded in a two-phase matrix containing nanocrystalline (< 5 nm) graphite. (C) 1998 Elsevier Science S.A.

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KW - AFM

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