A set of cross sections and transport coefficients for CF3+ ions in CF4

Jasmina Jovanović; Vladimir Stojanović; Zoran Raspopović; Jaime de Urquijo; Zoran Petrovic

doi:10.1088/1361-6595/ab122f

A set of cross sections and transport coefficients for CF3+ ions in CF4

Jasmina Jovanović, Vladimir Stojanović, Zoran Raspopović, Jaime de Urquijo, Zoran Petrovic

Research output: Contribution to journal › Article › peer-review

3 Citations (Scopus)

Abstract

A cross section set for CF3 + ions in CF4 gas has been assembled from the available experimental and theoretical data using a swarm method. Elastic cross section consistent with the available experimental mobility data has been derived and the set also includes the reactive cross sections. Reactive rates are deduced for collision energies of up to 500 eV. The transport properties of
CF3 + ions in CF4 gas in DC (direct current) electric field fields at a gas temperature of T=300 K were calculated as a function of the reduced electric field E/N (E is electric field and N is gasnumber density) by using a Monte Carlo simulation. The non-conservative collisions are alsotaken into account in the definition of transport coefficients.

Original language	English
Article number	045006
Number of pages	6
Journal	Plasma Sources Science and Technology
Volume	28
DOIs	https://doi.org/10.1088/1361-6595/ab122f
Publication status	Published (in print/issue) - 9 Apr 2019

Keywords

Monte Carlo methods
atomic, molecular, ion and heavy-particle collisions
kinetic and transport theory of gases

Access to Document

10.1088/1361-6595/ab122f

Cite this

@article{60d0a914d82340d18f6800927b7a43d6,

title = "A set of cross sections and transport coefficients for CF3+ ions in CF4",

abstract = "A cross section set for CF3 + ions in CF4 gas has been assembled from the available experimental and theoretical data using a swarm method. Elastic cross section consistent with the available experimental mobility data has been derived and the set also includes the reactive cross sections. Reactive rates are deduced for collision energies of up to 500 eV. The transport properties ofCF3 + ions in CF4 gas in DC (direct current) electric field fields at a gas temperature of T=300 K were calculated as a function of the reduced electric field E/N (E is electric field and N is gasnumber density) by using a Monte Carlo simulation. The non-conservative collisions are alsotaken into account in the definition of transport coefficients.",

keywords = "Monte Carlo methods, atomic, molecular, ion and heavy-particle collisions, kinetic and transport theory of gases",

author = "Jasmina Jovanovi{\'c} and Vladimir Stojanovi{\'c} and Zoran Raspopovi{\'c} and {de Urquijo}, Jaime and Zoran Petrovic",

year = "2019",

month = apr,

day = "9",

doi = "10.1088/1361-6595/ab122f",

language = "English",

volume = "28",

journal = "Plasma Sources Science and Technology",

issn = "0963-0252",

publisher = "Institute of Physics",

}

TY - JOUR

T1 - A set of cross sections and transport coefficients for CF3+ ions in CF4

AU - Jovanović, Jasmina

AU - Stojanović, Vladimir

AU - Raspopović, Zoran

AU - de Urquijo, Jaime

AU - Petrovic, Zoran

PY - 2019/4/9

Y1 - 2019/4/9

N2 - A cross section set for CF3 + ions in CF4 gas has been assembled from the available experimental and theoretical data using a swarm method. Elastic cross section consistent with the available experimental mobility data has been derived and the set also includes the reactive cross sections. Reactive rates are deduced for collision energies of up to 500 eV. The transport properties ofCF3 + ions in CF4 gas in DC (direct current) electric field fields at a gas temperature of T=300 K were calculated as a function of the reduced electric field E/N (E is electric field and N is gasnumber density) by using a Monte Carlo simulation. The non-conservative collisions are alsotaken into account in the definition of transport coefficients.

AB - A cross section set for CF3 + ions in CF4 gas has been assembled from the available experimental and theoretical data using a swarm method. Elastic cross section consistent with the available experimental mobility data has been derived and the set also includes the reactive cross sections. Reactive rates are deduced for collision energies of up to 500 eV. The transport properties ofCF3 + ions in CF4 gas in DC (direct current) electric field fields at a gas temperature of T=300 K were calculated as a function of the reduced electric field E/N (E is electric field and N is gasnumber density) by using a Monte Carlo simulation. The non-conservative collisions are alsotaken into account in the definition of transport coefficients.

KW - Monte Carlo methods

KW - atomic, molecular, ion and heavy-particle collisions

KW - kinetic and transport theory of gases

U2 - 10.1088/1361-6595/ab122f

DO - 10.1088/1361-6595/ab122f

M3 - Article

SN - 0963-0252

VL - 28

JO - Plasma Sources Science and Technology

JF - Plasma Sources Science and Technology

M1 - 045006

ER -

A set of cross sections and transport coefficients for CF3+ ions in CF4

Abstract

Keywords

Access to Document

Fingerprint

Cite this