A nanowire WO 3 humidity sensor integrated with micro-heater and inverting amplifier circuit on chip manufactured using CMOS-MEMS technique

Ching Liang Dai, Mao Chen Liu, Fu Song Chen, Chyan Chyi Wu, Ming Wei Chang

Research output: Contribution to journalArticle

63 Citations (Scopus)

Abstract

The fabrication of a nanowire WO 3 humidity sensor integrated with an inverting amplifier circuit and a micro-heater on a chip using the commercial 0.35 μm complementary metal oxide semiconductor (CMOS) process and a post-process have been implemented. The humidity sensor is composed of a sensing resistor and a humidity sensing film. Tungsten trioxide prepared by a sol-gel method is adopted as the humidity sensing film. The fabrication of the humidity sensor requires a post-process to etch the sacrificial layers and to expose the sensing resistor, and then the humidity sensing film is coated over the sensing resistor. The humidity sensor, which is a resistive type, changes the resistance when the sensing film adsorbs or desorbs water vapor. An inverting amplifier circuit is utilized to convert the resistance of the humidity sensor into the voltage output. The micro-heater is utilized to provide a super-ambient working temperature to the humidity sensor, which can avoid the humidity sensor to generate the signal drift. Experimental results show that the sensitivity of the humidity sensor is about 4.5 mV/% RH at 60 °C.

LanguageEnglish
Pages896-901
Number of pages6
JournalSensors and Actuators, B: Chemical
Volume123
Issue number2
DOIs
Publication statusPublished - 21 May 2007

Fingerprint

Humidity sensors
heaters
Nanowires
microelectromechanical systems
MEMS
humidity
CMOS
nanowires
amplifiers
Metals
chips
Networks (circuits)
sensors
Resistors
Atmospheric humidity
resistors
Fabrication
Oxide semiconductors
Steam
Water vapor

Keywords

  • CMOS
  • Humidity sensor
  • Inverting amplifier circuit
  • Micro-heater

Cite this

Dai, Ching Liang ; Liu, Mao Chen ; Chen, Fu Song ; Wu, Chyan Chyi ; Chang, Ming Wei. / A nanowire WO 3 humidity sensor integrated with micro-heater and inverting amplifier circuit on chip manufactured using CMOS-MEMS technique. 2007 ; Vol. 123, No. 2. pp. 896-901.
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A nanowire WO 3 humidity sensor integrated with micro-heater and inverting amplifier circuit on chip manufactured using CMOS-MEMS technique. / Dai, Ching Liang; Liu, Mao Chen; Chen, Fu Song; Wu, Chyan Chyi; Chang, Ming Wei.

Vol. 123, No. 2, 21.05.2007, p. 896-901.

Research output: Contribution to journalArticle

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