Low pressure (0.1 - 0.2 mbar) capacitively-coupled RF nitrogen plasma is used for plasma functionalization of carbon nanotubes. To optimize the functionalization, the samples are exposed at different distances (0 - 93 mm) from plasma source. To analyze the active species, the mass spectrometry is done at same positions. On short distances the majority of ion flux consists of N2+ ions. However, the large flux of N2H+ , H2O+ and H3O+ is detected too, which originate from relatively small amount of impurities. The possible ion-molecule reactions responsible for the detected ion fluxes are analyzed.
|Title of host publication||MASS SPECTRA ANALYSIS OF RF NITROGEN PLASMA FOR FUNCTIONALIZATION OF CARBON NANOSTRUCTURES|
|Editors||Dragana Marić, Aleksandar Milosavljević, Bratislav Obradović, Goran Poparić|
|Publisher||University of Belgrade, Faculty of Physics, Belgrade|
|Number of pages||3|
|Publication status||Published (in print/issue) - 29 Aug 2016|