Abstract
Low pressure (0.1 - 0.2 mbar) capacitively-coupled RF nitrogen plasma is used for plasma functionalization of carbon nanotubes. To optimize the functionalization, the samples are exposed at different distances (0 - 93 mm) from plasma source. To analyze the active species, the mass spectrometry is done at same positions. On short distances the majority of ion flux consists of N2+ ions. However, the large flux of N2H+ , H2O+ and H3O+ is detected too, which originate from relatively small amount of impurities. The possible ion-molecule reactions responsible for the detected ion fluxes are analyzed.
Original language | English |
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Title of host publication | MASS SPECTRA ANALYSIS OF RF NITROGEN PLASMA FOR FUNCTIONALIZATION OF CARBON NANOSTRUCTURES |
Editors | Dragana Marić, Aleksandar Milosavljević, Bratislav Obradović, Goran Poparić |
Publisher | University of Belgrade, Faculty of Physics, Belgrade |
Pages | 272-275 |
Number of pages | 3 |
ISBN (Electronic) | 978-86-84539-14-6 |
ISBN (Print) | 978-86-84539-14-6 |
Publication status | Published (in print/issue) - 29 Aug 2016 |